Semiconductor apparatus and device

ABSTRACT

A first conductive portion includes a first pad surrounded by a first insulator film in a plane perpendicular to a first direction, and a first via connected to the first pad so that the first via is positioned between the first pad and a first semiconductor layer in the first direction. A second conductive portion includes a second pad surrounded by a second insulator film in a plane perpendicular to the first direction, and a second via connected to the second pad so that the second via is positioned between the second pad and a second semiconductor layer in the first direction. The first and the second conductive portions are different in dimension.

BACKGROUND OF THE INVENTION Field of the Invention

The present disclosure relates to a semiconductor apparatus including aplurality of semiconductor layers.

Description of the Related Art

In known semiconductor apparatuses, a plurality of semiconductor layersis stacked, and a plurality of conductive portions disposed between theplurality of semiconductor layers is bonded to each other. JapanesePatent Application Laid-Open No. 2012-19147 discusses a solid-stateimaging apparatus in which bonding portions having a dual damascenestructure are bonded to each other.

In the solid-state imaging apparatus discussed in Japanese PatentApplication Laid-Open No. 2012-19147, the shape of bonding portions hasnot been sufficiently considered. Accordingly, there is room forimproving the electrical and/or mechanical reliability of bonding.

SUMMARY OF THE INVENTION

The present disclosure is directed to providing a technique which isadvantageous in improving the bonding reliability for a plurality ofparts in a semiconductor apparatus. According to an aspect of thepresent disclosure, a semiconductor apparatus includes a firstsemiconductor component including a first semiconductor layer and afirst insulator film over the first semiconductor layer, and a secondsemiconductor component including a second semiconductor layer and asecond insulator film over the second semiconductor layer. The first andthe second semiconductor layers are stacked so that the first and thesecond insulator films are positioned between the first and the secondsemiconductor layers in a first direction. The first and the secondsemiconductor components are bonded to each other by a first conductiveportion disposed in a recessed portion formed in the first insulatorfilm and a second conductive portion disposed in a recessed portionformed in the second insulator film. The first conductive portionincludes a first pad surrounded by the first insulator film in a planeperpendicular to the first direction, and a first via connected to thefirst pad so that the first via is positioned between the first pad andthe first semiconductor layer in the first direction, the first viabeing connected to a first conductor layer positioned between the firstvia and the first semiconductor layer in the first direction. The secondconductive portion includes a second pad surrounded by the secondinsulator film in a plane perpendicular to the first direction, and asecond via connected to the second pad so that the second via ispositioned between the second pad and the second semiconductor layer inthe first direction, the second via being connected to a secondconductor layer positioned between the second via and the secondsemiconductor layer in the first direction.

Further features of the present disclosure will become apparent from thefollowing description of exemplary embodiments with reference to theattached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B schematically illustrate a semiconductor apparatus.

FIGS. 2A and 2B schematically illustrate the semiconductor apparatus.

FIGS. 3A, 3B, 3C, and 3D schematically illustrate a method formanufacturing the semiconductor apparatus.

FIGS. 4A, 4B, 4C, and 4D schematically illustrate another method formanufacturing the semiconductor apparatus.

FIG. 5 schematically illustrates another method for manufacturing thesemiconductor apparatus.

DESCRIPTION OF THE EMBODIMENTS

An exemplary embodiment of the present disclosure will be describedbelow with reference to the accompanying drawings. In the followingdescriptions and drawings, configurations common to a plurality ofdrawings are assigned the same reference numerals. Thus, commonconfigurations will be described below with cross-reference to theplurality of drawings, and descriptions of configurations assigned thesame reference numerals will be omitted as appropriate.

According to the present exemplary embodiment, the reliability isimproved by adjusting the dimensions of conductive portions used for thebonding in a semiconductor apparatus 930 including two differentsemiconductor components (chips) bonded to each other. Morespecifically, the dimensions of vias and pads in the conductive portionsare adjusted. The thicknesses of a via and a pad refer to the dimensionsof the via and the pad, respectively, in a direction in whichsemiconductor layers included in each of the two semiconductorcomponents are stacked (stacking direction). The stacking direction isperpendicular to the principal surfaces of the semiconductor layersincluded in each of the two semiconductor components. The widths of avia and a pad refer to the dimensions of the via and the pad,respectively, in the direction (in-plane direction) along the principalsurfaces of the semiconductor layers included in the two semiconductorcomponents.

FIG. 1A is a sectional view schematically illustrating the semiconductorapparatus 930. The semiconductor apparatus 930 includes semiconductorcomponents 001 and 002. The semiconductor component 001 includes asemiconductor layer 100 and an insulator film 112 over the semiconductorlayer 100. The semiconductor component 002 includes a semiconductorlayer 200 and an insulator film 212 over the semiconductor layer 200.The semiconductor components 001 and 002 overlap with each other and arebonded to each other at a bonding surface 400. The semiconductor layers100 and 200 are stacked so that the insulator films 112 and 212 arepositioned between the semiconductor layers 100 and 200 in a stackingdirection Z. Each of a plurality of conductive portions 113 is disposedin each of a plurality of recessed portions in the insulator film 112.Each of a plurality of conductive portions 213 is disposed in each of aplurality of recessed portions in the insulator film 212. Thesemiconductor components 001 and 002 are bonded to each other by theconductive portions 113 disposed in respective recessed portions in theinsulator film 112 and the conductive portions 213 disposed inrespective recessed portions in the insulator film 212.

The plane perpendicular to the stacking direction Z is an X-Y plane. TheX-Y plane is a plane along the principal surface of the semiconductorlayer 100 and/or the principal surface of the semiconductor layer 200.The X and Y directions are orthogonal to each other and parallel to theprincipal surface of the semiconductor layer 100 and/or the principalsurface of the semiconductor layer 200. FIG. 1A illustrates a sectionalview of the semiconductor apparatus 930 taken along the direction inwhich the semiconductor layers 100 and 200 are stacked (Z-axisdirection).

Each of the conductive portions 113 includes a pad 311 and vias 312. Thepad 311 is surrounded by the insulator film 112 in the X-Y plane. Thevias 312 are connected to the pad 311 to be positioned between the pad311 and the semiconductor layer 100 in the stacking direction Z. Thevias 312 are connected to the conductor layer 111 positioned between thevias 312 and the semiconductor layer 100 in the stacking direction Z.The conductor layer 111 is in proximity to the vias 312. Morespecifically, the distance between each of the vias 312 and theconductor layer 111 is smaller than the distance between each of thevias 312 and the conductive portion 213. According to the presentexemplary embodiment, the vias 312 contact the conductor layer 111 witha zero distance between each of the vias 312 and the conductor layer111. A thin conductor layer may be disposed between the vias 312 and theconductor layer 111 so that the vias 312 are connected to the conductorlayer 111 via the thin conductor layer. Typically, a barrier metal layeris used as the thin conductor layer which can be disposed between thevias 312 and the conductor layer 111.

Each of the conductive portions 213 includes a pad 321 and vias 322. Thepad 321 is surrounded by the insulator film 212 in the X-Y plane. Thevias 322 are connected to the pad 321 to be positioned between the pad321 and the semiconductor layer 200 in the stacking direction Z. Thevias 322 are connected to the conductor layer 211 between the vias 322and the semiconductor layer 200 in the stacking direction Z. Theconductor layer 211 is in proximity to the vias 322. More specifically,the distance between each of the vias 322 and the conductor layer 211 issmaller than the distance between each of the vias 322 and theconductive portion 113. According to the present exemplary embodiment,the vias 322 contact the conductor layer 211 with a zero distancebetween each of the vias 322 and the conductor layer 211. A thinconductor layer may be disposed between the vias 322 and the conductorlayer 211 so that the vias 322 are connected to the conductor layer 211via the thin conductor layer. Typically, a barrier metal layer is usedas the thin conductor layer which can be disposed between the vias 322and the conductor layer 211.

The semiconductor apparatus 930 includes wiring structures 010 and 020disposed between the semiconductor layers 100 and 200. The semiconductorcomponent 001 is a semiconductor component (semiconductor chip)including the semiconductor layer 100 and the wiring structure 010, andthe semiconductor component 002 is a semiconductor component(semiconductor chip) including the semiconductor layer 200 and thewiring structure 020. Each of the wiring structures 010 and 020 includesa plurality of stacked wiring layers and a plurality of stackedinsulating films (described below). Thus, the wiring structures 010 and020 bonded to each other can also be referred to as a wiring structureportion in the semiconductor apparatus 930. The bonding of thesemiconductor components 001 and 002 to each other forms thesemiconductor apparatus 930.

The structure between the semiconductor layer 100 and the semiconductorcomponent 002 (between the semiconductor layer 100 and the wiringstructure 020) is the wiring structure 010. The wiring structure 010includes the above-described conductive portions 113 and the conductorlayer 111. In addition to the conductive portions 113 and the conductorlayer 111, the wiring structure 010 can include via plugs 110, a wiringlayer 107, via plugs 108, a wiring layer 105, and contact plugs 104between the conductor layer 111 and the semiconductor layer 100. Thewiring structure 010 also includes the above-described insulator film112 and, in addition to the insulator film 112, can include interlayerinsulating films 109, 106, and 103 between the insulator film 112 andthe semiconductor layer 100.

The structure between the semiconductor layer 200 and the semiconductorcomponent 001 (between the semiconductor layer 200 and the wiringstructure 010) is the wiring structure 020. The wiring structure 020includes the above-described conductive portions 213 and conductor layer211. In addition to the conductive portions 213 and the conductor layer211, the wiring structure 020 can include via plugs 210, a wiring layer207, via plugs 208, a wiring layer 205, and contact plugs 204 betweenthe conductor layer 211 and the semiconductor layer 200. The wiringstructure 020 also includes the above-described insulator film 212 and,in addition to the insulator film 212, can include interlayer insulatingfilms 209, 206, and 203 between the insulator film 212 and thesemiconductor layer 200. Although the conductor layers 111 and 211 canalso be referred to as wiring layers, these layers are referred to asthe conductor layers 111 and 211 to distinguish these wiring layers inproximity to the vias 312 and 322 from other wiring layers. The viaplugs 208 connect the wiring layers 205 and 207, and the via plugs 210connect the wiring layer 207 and the conductor layer 211. Each of theconductive portions 213 has a damascene structure embedded in therecessed portion in the insulator film 212. At least part of theconductive portion 213 connects to the conductor layer 211. According tothe present exemplary embodiment, the conductive portion 213 has a dualdamascene structure and includes the pad 321 and the vias 322. Thesemiconductor components 001 and 002 are electrically connected witheach other by the conductive portions 113 and 213. For the conductiveportion 113 of the semiconductor component 001 and conductive portion213 of the semiconductor component 002, the following dimensionalrelation between the pad and the vias may be satisfied. This enablespreventing the detachment of the semiconductor components 001 and 002from the bonding surface 400 under the influence of the thermalexpansion of the conductive portion 113 or 213 in a heat process duringmanufacturing and when the temperature rises during operation. Thus, thebonding reliability in the semiconductor apparatus 930 can be improved.In the semiconductor apparatus 930 illustrated in FIG. 1A includes fourdifferent conductive portions each having vias and pads. If at least oneconductive portion satisfies the above-described dimensional relation,the reliability at the bonding portion of the semiconductor apparatus930 can be improved. As the number of conductive portions satisfying arelation (described below) increases, the reliability at the bondingportion of the semiconductor apparatus 930 improves to a further degree.

Although the conductive portions 113 and 213 are preferably mainly madeof copper, the present invention is not limited thereto. The conductiveportions 113 and 213 may be mainly made of gold or silver. The insulatorfilms 112 and 212 are preferably mainly made of a silicon compound. Theinsulator films 112 and 212 may have a multilayer structure including aplurality of materials, such as a film structure with stacked layersincluding a layer (e.g., a silicon nitride layer) for preventing metaldiffusion, a silicon oxide layer, and a low-k material layer. Thismultilayer structure enables preventing the influence of metal diffusiondue to a bonding deviation between the conductive portions 113 and 213caused by an alignment deviation occurring in bonding the semiconductorcomponents 001 and 002. The insulator films 112 and 212 may be mainlymade of resin.

The conductive portions 113 and the insulator film 112 are collectivelyreferred to as a bonding member 411, and the conductive portions 213 andthe insulator film 212 are collectively referred to as a bonding member421. The bonding member 411 included in the semiconductor component 001and the bonding member 421 included in the semiconductor component 002are bonded to each other. The contact plugs 104, the wiring layers 105and 107, the conductor layer 111, the conductive portions 113 and 213,the conductor layer 211, the wiring layers 207 and 205, and the contactplugs 204 are electrically continuous over the range from thesemiconductor layer 100 to the semiconductor layer 200. These form thewiring (interlayer wiring) between the semiconductor layers 100 and 200.One end of the interlayer wiring may be connected to the gate electrodeand the other end thereof may be connected to the source/drainelectrode. Alternatively, one and the other ends of the interlayerwiring may be connected to the source/drain electrode.

In the semiconductor apparatus 930, the wiring structures 010 and 020are bonded to each other. In more detail, the wiring structures 010 and020 are bonded to each other at the bonding surface 400 formed by thebonding member 411 of the wiring structure 010 and the bonding member421 of the wiring structure 020. The bonding surface 400 includes thesurfaces of the bonding members 411 and 421.

FIG. 1B schematically illustrates a device 9191 including thesemiconductor apparatus 930. The semiconductor apparatus 930 includes asemiconductor device 910 including the semiconductor components 001 and002, and can further include a package 920 for storing the semiconductordevice 910. However, the semiconductor apparatus 930 does not need toinclude the package 920. The semiconductor layers 100 and 200 areincluded in the semiconductor device 910. According to the presentexemplary embodiment, the semiconductor apparatus 930 is a photoelectricconversion apparatus (imaging apparatus). The semiconductor device 910includes a pixel region 901 where pixel circuits 900 are arranged inmatrix array, and a peripheral region 902 around the pixel region 901.Peripheral circuits and input/output terminals can be provided in theperipheral region 902. The semiconductor apparatus 930 is included inthe device 9191. The device 9191 can include at least one of an opticalapparatus 940, a control apparatus 950, a processing apparatus 960, adisplay apparatus 970, a storage apparatus 980, and a mechanicalapparatus 990. The device 9191 will be described in detail below.

The bonding between the wiring structure 010 of the semiconductorcomponent 001 and the wiring structure 020 of the semiconductorcomponent 002 will be described in detail below. FIG. 2A is an enlargedsectional view illustrating the bonding portion between the wiringstructure 010 (bonding member 411) of the semiconductor component 001and the wiring structure 020 (bonding member 421) of the semiconductorcomponent 002. FIG. 2A is also an enlarged view illustrating thevicinity of the bonding surface 400 between the bonding members 411 and421. The vias 312 have a length La in the stacking direction Z, and thevias 322 have a length Lb in the stacking direction Z. The pad 311 has athickness Ta in the stacking direction Z, and the pad 321 has athickness Tb in the stacking direction Z. The vias 312 have a width Wain the in-plane direction X perpendicular to the stacking direction Z,and the vias 322 have a width Wb in the in-plane direction X. The pad311 has a thickness Pa in the in-plane direction X, and the pad 321 hasa thickness Pb in the in-plane direction X. The dimensions of the vias312 and 322 and the pads 311 and 321 in the in-plane direction Y may beidentical to or different from the dimensions in the in-plane directionX.

It is desirable to satisfy at least one of the following relations (A),(B), (C), (D), and (E):La<Lb,  (A)Wa>Wb,  (B)La/Lb<Ta/Tb,  (C)Pa/Pb<Wa/Wb, and  (D)La/Wa<Lb/Wb.  (E)

All the relations (A), (B), (C), (D), and (E) indicate factors which mayrelatively decrease the resistance of the vias 312, and factors whichmay relatively increase the resistance of the vias 322 when the stackingdirection Z is set as the current flowing direction. For example, therelation (A) corresponds to that the resistance of the vias increases asthe length thereof increases, not as decreases. The relation (B)corresponds to that the resistance of the vias increases as the widththereof increases, not as decreases. The relation (C) corresponds tothat the difference in length of the vias is larger than the differencein thickness of the pad. When the relation (C) is transformed toLa/Ta<Lb/Tb and standardized in terms of the thickness of the pad, theresultant formula means that the length La is relatively smaller thanthe length Lb. When Ta=Tb is applied to the relation (C), the relation(C) coincides with the relation (A). The relation (D) corresponds tothat the difference in width between the vias is larger than thedifference in width between the pads. When the relation (D) istransformed to Wb/Pb<Wa/Pa and standardized in terms of the thickness ofthe pad, the resultant formula means that the width Wa is relativelylarger than the width Wb. When Pa=Pb is applied to the relation (D), therelation (D) coincides with the relation (B). The relation (E) indicatesthe relation of the ratio of the lengths of the vias to the widths ofthe vias corresponding to the resistance of the vias. When Wa=Wb isapplied to the relation (E), the relation (E) coincides with therelation (A). When La=Lb is applied to the relation (E), the relationcoincides with the relation (B). It is not essential that the resistanceof the vias 312 is lower than that of the vias 322. Even in a case wherethe resistance of the vias 312 is higher than that of the vias 322, ifany one of the above-described relations (A), (B), (C), (D), and (E) issatisfied, the difference in resistance between the vias 312 and 322 canbe made smaller than that in a case where none of the above-describedrelations (A), (B), (C), (D), and (E) is satisfied.

It is desirable to satisfy at least one of the relations (α) and (β) outof the following relations (α), (β), (γ), and (δ):

(α) The conductor layer 111 is mainly made of aluminum;

(β) The conductor layer 211 is mainly made of copper:

(γ) The conductor layer 111 is mainly made of copper, and

(δ) The conductor layer 211 is mainly made of aluminum.

In the following combination of the relations (α), (β), (γ), and (δ),the combination [αβ] satisfying the relations (α) and (β) may beadopted. The combination [βγ] satisfying the relations (β) and (γ) maybe adopted. The combination [αδ] satisfying the relations (α) and (δ)may be adopted. Since it is necessary to satisfy at least one of therelations (α) and (β), the combination [γδ] satisfying none of therelations (α) and (β) and satisfying the relations (γ) and (δ) is notadopted. A case where the relation (α) is satisfied will provide astructure in which the resistance of the conductor layer 111 tends tobecome higher than that in a case where the conductor layer 111 ismainly made of copper (relation (γ)). A case where the relation (β) issatisfied will provide a structure in which the resistance of theconductor layer 211 tends to become lower than that in a case where theconductor layer 211 is mainly made of aluminum (relation (δ)). This isbecause the resistivity of aluminum (about 28 nΩm) is higher than thatof copper (about 17 nΩm). The main component of the conductor layersindicates the element having the highest element concentration (atomicconcentration) out of the elements (atoms) forming the conductor layer.For example, the conductor layer mainly made of aluminum may containcopper with a concentration lower than aluminum, and the conductor layermainly made of copper may contain germanium with a lower concentrationthan copper.

The combination of the vias 312 and 322 with the conductor layers 111and 211 connected thereto is considered. If the resistance of the vias312 is higher than that of the vias 322, and the resistance of theconductor layer 111 is also higher than that of the conductor layer 211,the wiring resistance of the wiring structure 010 in the semiconductorcomponent 001 is more likely to become higher than that of the wiringstructure 020 in the semiconductor component 002. Then, unbalance occursbetween the semiconductor components 001 and 002. Even if the resistanceof the vias 312 is lower than that of the vias 322, and the resistanceof the conductor layer 111 is also lower than that of the conductorlayer 211, the wiring resistance of the wiring structure 010 in thesemiconductor component 001 is more likely to become lower than that ofthe wiring structure 020 in the semiconductor component 002. Then,unbalance occurs between the semiconductor components 001 and 002.

Such unbalance can be reduced by satisfying at least one of thefollowing relations (A), (B), (C), (D), and (E) and satisfying at leastone of the relations (α) and (β). More specifically, the unbalance canbe reduced by making the resistivity of the conductor layer 111, towhich the vias 312 having a relatively lower resistance out of the vias312 and 322 are connected, higher than that of the conductor layer 211(combination [αβ]). Alternatively, the unbalance can be reduced bymaking the resistivity of the conductor layer 111, to which the vias 312having a relatively lower resistance out of the vias 312 and 322 areconnected, identical to that of the conductor layer 211 (combination[βγ] or [αδ]).

The following relation (F) can be satisfied:La/Wa>Lb/Wb.  (F)

The relation (F) is opposite to the relation (E). When the relation (F)is transformed, the relation La/Lb>Wa/Wb results.

The following relation (G) may also be satisfied:Ta>Tb.  (G)

It is desirable that both the relations (G) and (A) is satisfied toprevent the thickness of the conductive portion 113 and the thicknessTb+Lb of the conductive portion 213 from being largely different fromeach other in the case of different thicknesses of the pads 311 and 321according to the relation (G).

The following relation (H) may also be satisfied:La*Ta>Lb*Th.  (H)

When La is equal to Lb (La=Lb) in the relation (H), the relation (H)coincides with the relation (G). This means that, when both relations(A) and (H) are satisfied, Ta needs to be much larger than Tb (Ta>>Tb).

The following relation (1) may also be satisfied:La−Lb<Ta−Tb.  (I)

When the relation (I) is transformed, the relation La−Ta<Lb−Tb results.This means, for example, that the conductive portion 113 has a smallerdifference between the thickness of the pad and the length of each ofthe vias than the conductive portion 213. When Ta is equal to Tb (Ta=Tb)in the relation (I), the relation (I) coincides with the relation (A).

It is also desirable to satisfy the following relation (J):La+Ta<Lb+Tb.  (J)

The relation (J) means that the length (thickness) of the conductiveportion 113 is smaller than the length (thickness) of the conductiveportion 213. This enables reducing the variation of the length(thickness) of the conductive portion 113, thus improving the bondingreliability, compared with the combination [γδ]. When Ta is equal to Tb(Ta=Tb) in the relation (J), the relation (J) coincides with therelation (A).

Satisfying at least one of the above-described relations (G), (H), (I),and (J) enables preventing the detachment on the bonding surface 400 dueto the force occurring when the conductive portions 113 and 213thermally expand in the stacking direction or preventing bondingfailures during bonding. When any one of the relations (A), (C), (G),(H), (I), and (J) is satisfied, the relation (F) may also be satisfied.

It is also desirable to satisfy the following relation (K):|Ta−Tb|<|La−Lb|.  (K)

The relation (K) means that the difference in thickness between the pads311 and 321 is relatively small. The mechanical reliability of thebonding surface 400 is ensured mainly by the pads 311 and 321. If,however, the pads 311 and 321 are largely different in thickness, theamount of thermal expansion of the pads 311 and 321 in the stackingdirection will be different, degrading the mechanical reliability of thebonding.

Specific examples of the dimensions of each part of the conductiveportions 113 and 213 will be described below. La and Lb are 0.7 to 0.9μm, Wa and Wb are 0.3 to 0.8 μm, Pa and Pb are 0.5 to 4 μm, and Ta andTb are 0.4 to 0.6 μm. The difference between La and Lb is 0.04 to 0.08μm, the differences between Wa and Wb is 0 to 0.05 μm, the differencebetween Pa and Pb is 0 to 0.5 μm, and the difference between Ta and Tbis 0 to 0.1 μm. As a more specific combination, La=0.77 μm, Lb=0.83 μm.Wa=0.39 μm, Wb=0.39 μm, Pa=3.0 μm, Pb=3.0 μm, Ta=0.51 μm, and Tb=0.51μm, resulting in a relation Pa=Pb>Lb>La>Ta=Tb>Wa=Wb. This combinationsatisfies the above-described relations (A), (C), (E), (I), and (J). Inparticular, the bonding reliability can be improved particularly whenthe combination [αβ] is satisfied.

The conductor layer 111 can be formed through patterning based on thephotolithography and the etching techniques after depositing an aluminumfilm through, for example, the Physical Vapor Deposition (PVD) method.Subsequently, the insulator film 112 is deposited on the patternedconductor layer 111, and the uppermost surface of the insulator film 112is flattened through the Chemical Mechanical Polishing (CMP) method.When the conductor layer 211 is mainly made of copper, the conductivelayer 211 is formed to be embedded in a recessed portion of theinterlayer insulating film 209 through a damascene process. Thus, theunderneath of the insulator film 212 has larger unevenness than theapproximately flat surface formed by the interlayer insulating film 209and the conductive layer 211 as the underneath of the insulator film112. Therefore, there is a concern that the flatness of the insulatorfilm 112 in the wafer surface becomes lower than that of the insulatorfilm 212 formed on the conductor layer 211, under the influence of theconductor layer 111. In the wafer surface, this influence may cause alarger variation of the length La of the via 312 forming the conductiveportion 113 than the variation of the length Lb of the via 322 formingthe conductive portion 213. There is another concern about the decreasein the variation of the width Wa at contact portions between theconductor layer 111 and the via 312, and the increase in a contactresistance attendant thereon. The contact resistance between theconductor layer 111 made of aluminum and the vias 312 made of copper islarger than that between the conductor layer 211 made of copper and thevias 322 made of copper. The decrease in the variation of the width Waof the vias 312 will influence the increase and the variation decreasein the contact resistance between the conductor layers 111 and 211 viathe conductive portions 113 and 213, respectively.

In bonding the semiconductor components 001 and 002 to each other toelectrically connect the conductive portions 113 and 213, heatprocessing at about 300 to 400 degrees Celsius can be performed. Thevariation in the length La of the vias 312 in the wafer surfaceinfluences the thermal expansion of Cu of the trenches and the vias inthe conductive portions during the heat processing. There has been aconcern that, depending on the volumetric relation between the trenchand the vias, the influence of the volumetric variation of the viasincreases and causes the detachment from the bonding surface 400.

According to the exemplary embodiment, adopting the relation (A) La<Lbrelatively reduces the length La, making it possible to reduce theinfluence of the variation of the width Wa of the vias 312. Reducing thelength La relatively decreases the volumes of the vias 312 with respectto the volumes of the trenches in the conductive portion 113. Thisenables relatively reducing the influence of the volumetric variation ofthe vias 312 in the thermal expansion of copper of the pads and the viasin the conductive portions, thus preventing the detachment on thebonding surface 400 due to the influence of the thermal expansion of theconductive portions. Moreover, adopting the relation (B) Wa>Wb enablespreventing a variation decrease and an increase in the contactresistance of wiring. Adopting the relation (G) Ta>Tb relatively reducesthe volume of the vias 312 with respect to the volume of the pad 311 ofthe conductive portion 113. This enables relatively reducing theinfluence of the volumetric variation of the vias 312 in the thermalexpansion of copper of the pad 311 and the vias 312 in the conductiveportion 113, thus preventing the detachment on the bonding surface 400due to the influence of the thermal expansion of the conductive portion113. The conductor layer 111 is not limited to an aluminum layer and maybe a copper layer.

Adopting the relation (C) La/Lb<Ta/Tb, which means that the ratio of thelength La to the length Lb is made smaller than the ratio of thethickness Ta to the thickness Tb, enables preventing the detachment onthe bonding surface 400 due to the influence of the thermal expansion ofthe conductive portions. Adopting the relation (K) |Ta−Tb<|La−Lb|, whichmeans that the difference between the lengths La and Lb is made largerthan the difference between the thicknesses Ta and Tb, enablespreventing the detachment on the bonding surface 400 due to theinfluence of the thermal expansion of the conductive portions. This isbecause the volumes of the vias are relatively smaller than the volumesof the trenches in the conductive portions 113 and 213. In the case ofLa<Lb, that is, making the ratio of the length La to the length Lblarger than the ratio of the thickness Tb to the thickness Ta(Tb/Ta<La/Lb) enables preventing the detachment on the bonding surface400 under the influence of the thermal expansion of the conductiveportions. When Tb/Ta<La/Lb is transformed to La*Ta>Lb*Tb, this coincideswith the relation (H). Further, making the difference between thelengths La and Lb larger than the difference between the thicknesses Taand Tb (|Ta−Tb|<|La−Lb|) enables preventing the detachment on thebonding surface 400 due to the influence of the thermal expansion of theconductive portions. This is because the volumes of the vias arerelatively smaller than the volumes of the trenches in the conductiveportions 113 and 213.

In the heat processing for solid wafer bonding, satisfying theabove-described relations enables preventing the detachment from thebonding surface 400 due to the influence of the thermal expansion of theconductive portions, thus improving the bonding reliability in thesemiconductor apparatus. The above-described relations also enablepreventing the increase and the variation decrease in the contactresistance between the conductive portion and the wiring layer.

Depending on the volume of the conductive portions, the detachment fromthe bonding surface 400 may occur due to the influence of the thermalexpansion of the conductive portions. At the bonding portion where thetrench and the vias are formed, an increase in the junction resistancebetween the vias and the wiring and the increase in the resistancevariation may possibly occur depending on the structure of the wiringlayer electrically connected with the vias and the length of the vias.According to the present exemplary embodiment, for example, in a casewhere the conductor layer 111 is an aluminum layer and the conductorlayer 211 is a copper layer, the thicknesses of the vias 312 and 322 aredefined to satisfy the relation (A) La<Lb. Defining the widths of thevias 312 and 322 to satisfy the relation (B) Wa>Wb enables reducing thejunction resistance between the bonding portion and the wiring layer toprevent the resistance variation while improving the reliability of thebonding portion in the semiconductor apparatus. Alternatively, definingthe thicknesses of the pads 311 and 321 to satisfy the relation (G)Ta>Tb enables reducing the junction resistance between the bondingportion and the wiring layer to prevent the resistance variation whileimproving the reliability of the bonding portion in the semiconductorapparatus. The conductor layer 111 is not limited to an aluminum layer.

Making the ratio of the length La to the length Lb smaller than theratio of the thickness Ta to the thickness Tb (La/Lb<Ta/Tb) to satisfythe relation (C) enables preventing the detachment from the bondingsurface 400 due to the influence of the thermal expansion of theconductive portions. Further, adopting the relation (I) La−Lb<Ta−Tb,which means that the difference between the lengths La and Lb is madelarger than the difference between the thicknesses Ta and Tb, enablespreventing the detachment from the bonding surface 400 due to theinfluence of the thermal expansion of the conductive portions. This isbecause the volumes of the vias are relatively smaller than the volumesof the trenches in the conductive portions 113 and 213. Further, whenthe lengths of the vias 312 and 322 are defined to satisfy the relation(A) La<Lb, the definition is made to satisfy the relation (H)Tb/Ta<La/Lb, which means that the ratio of the length La to the lengthLb is larger than the ratio of the thickness Tb to the thickness Ta.This enables preventing the detachment from the bonding surface 400 dueto the influence of the thermal expansion of the conductive portions.Further, satisfying the relation (K) |Ta−Tb|<|La−Lb|, which means thatthe difference between the lengths La and Lb is made larger than thedifference between the thicknesses Ta and Tb, enables preventing thedetachment on the bonding surface 400 due to the influence of thethermal expansion of the conductive portions. This is because thevolumes of the vias are relatively smaller than the volumes of thetrenches in the conductive portions 113 and 213.

The conductive portions 113 and 213 are desirably mainly made of copper,the present invention is not limited thereto. The conductive portions113 and 213 may be mainly made of a metal having high spreadability,such as gold and silver. The insulator films 112 and 212 are desirablymainly made of a silicon compound. The insulator films 112 and 212 mayhave a multilayer structure made of a plurality of materials, such as amultilayer film structure having the stacking of a layer for preventingmetal diffusion (e.g., a silicon nitride layer and a silicon carbidelayer) and a silicon oxide layer. This configuration enables preventingthe influence of metal diffusion due to the bonding deviation of theconductive portions 113 and 213 caused by the alignment deviationoccurring when bonding the semiconductor components 001 and 002 to eachother. The insulator films 112 and 212 may be mainly made of resin.

The wiring structure 010 includes an interlayer insulating film 103, acontact plug 104, the wiring layer 105, an interlayer insulating film106, the wiring layer 107, a via plug 108, an interlayer insulating film109, a via plug 110, and the conductor layer 111. The wiring structure010 further includes the insulator film 112 disposed on the conductorlayer 111. The wiring structure 010 further includes a plurality of theconductive portions 213, the insulator film 112, and the plurality ofthe conductive portions 113. The bonding member 411 is part of thewiring structure 010 and includes the insulator film 112 and theplurality of the conductive portions 113. Typically, the thermalexpansion coefficient of the conductive portions 113 is larger than thatof the insulator film 112, and the thermal expansion coefficient of theconductive portions 213 is larger than that of the insulator film 212.The via plug 108 connects the wiring layers 105 and 107, and the viaplug 110 connects the wiring layer 107 and the conductor layer 111.

The plurality of the conductive portions 113 has a damascene structureembedded in respective recessed portions in the insulator film 112, andis used to electrically connect the semiconductor component 001 to thesemiconductor component 002. Each of the conductive portions 113includes the pad 311 and the vias 312. One pad 311 is surrounded by theinsulator film 112 in the X-Y plane. The contour of one pad 311coincides with the contour of the insulator film 112 surrounding the onepad 311. Ma vias 312 (Ma is a natural number) are connected to one pad311 included in each conductive portion 113. While Ma is 4 asillustrated in FIG. 2B in the present exemplary embodiment, Ma may be 1or 2. The above-described length La and width Wa indicate the length andthe width of one via out of the Ma vias 312. In the case of Ma>2, whenone via has the length La and the width Wa, another via does notnecessarily need to coincide with the length La and the width Wa but itis desirable that the other vias coincide with the length La and thewidth Wa. The Ma vias 312 are positioned between the pad 311 and thesemiconductor layer 100 in the stacking direction Z. More specifically,the Ma vias 312 are positioned in the orthogonal projection from one pad311 to the principal surface of the semiconductor layer 100. The widthof one via 312 is larger than the width of one pad 311. Each of the Mavias 312 is surrounded by the insulator film 112 in the X-Y plane. Theinsulator film 112 exists between any adjacent two of the Ma vias 312.The contour of one via 312 coincides with the contour of the insulatorfilm 112 surrounding the one via 312. According to the present exemplaryembodiment, it is desirable that the thickness of the vias 312 is largerthan the thickness of the pad 311. The term “thickness” according to thepresent exemplary embodiment refers to the dimension in the Z-axisdirection. The conductive portion 113 is connected with the conductorlayer 111 made of aluminum. More specifically, at least part of the vias312 is connected with the conductor layer 111. For example, the pad 311and the vias 312 of the conductive portion 113 are formed in a dualdamascene structure, and are mainly made of copper (Cu). As illustratedin FIG. 1A, the bonding member 411 can have the conductive portion 114in a single damascene structure having a pad and no vias. As illustratedin FIG. 1A, the bonding member 421 can have the conductive portion 214with a single damascene structure having a pad and no vias. The bondingbetween the semiconductor components 001 and 002 can be strengthened toa further extent through the bonding between the conductive portions 214and 114.

To bond the semiconductor components 001 and 002 to each other toelectrically connect the conductive portions 113 and 213, it isdesirable to perform heat processing at around 300 to 400 degreesCelsius. There is, however, a concern that, the influence of the thermalexpansion of the vias 312 increases and causes the detachment from thebonding surface 400 in the heat processing, depending on the volumetricrelation between the pad 311 and the vias 312. In some manufacturingprocesses (film formation, etching, and annealing) after the bonding,heat processing at about 100 to 400 degrees Celsius can be performed. Inthe heat processing, there is also a concern that the influence of thethermal expansion of the vias 312 increases and causes the detachmentfrom the bonding surface 400. The semiconductor apparatus 930 may beused, for example, under the environment at around 0 degrees Celsius. Insuch a case, the temperature of the semiconductor apparatus 930 mayincrease to around 80 degrees Celsius by the heat generation in thesemiconductor apparatus 930 during operation. The durability to such atemperature cycle is also demanded. The inventors consider that moredesirable bonding is obtained with a relatively smaller ratio of thevolume of the pad 311 to the volume of the vias 312 and that decreasingthe ratio of the volume of the vias 312 to the volume of one pad 311 iseffective. It is presumed that such volumetric nonuniformity in theconductive portions degrades the bonding reliability.

As illustrated in FIG. 2A, the bonding member 411 includes the conductorlayer 111, the insulator film 112, and the conductive portion 113. Asdescribed above with reference to FIG. 2A, the semiconductor component001 includes semiconductor components, such as transistors, a pluralityof wiring layers on the semiconductor components, and the conductorlayer 111 as the uppermost layer of the plurality of wiring layers. Theconductive portion 113 is connected with the conductor layer 111. Theconductive portion 113 includes the pad 311 and the vias 312. Forexample, the pad 311 and the vias 312 in the conductive portion 113 areformed in a dual damascene structure and made of copper (Cu). Thus, eachof the plurality of the conductive portions 113 includes a copper region3111 (copper portion) mainly made of copper for forming the pad 311, anda copper region 3121 (copper portion) mainly made of copper for formingthe vias 312. The copper region 3111 is continuous to the copper region3121. The pad 311 and the vias 312 are provided with a barrier metalfilm 3102 at the portion in contact with the insulator film 112,indicated by bold lines surrounding the conductive portion 113 in FIG.2A. The barrier metal film 3102 is made of tantalum (Ta), a tantalumcompound, titanium, or a titanium compound. The barrier metal film 3102includes a barrier metal portion 3112 which is a portion between thecopper region 3111 and the insulator film 112, and a barrier metalportion 3122 which is a portion between the copper region 3121 and theinsulator film 112. The barrier metal portion 3112 is continuous to thebarrier metal portion 3122. As described above, the pad 311 and the vias312 are provided with a copper (Cu) portion surrounded by a barriermetal. While the pad 311 has a square pole shape in the presentexemplary embodiment, and the vias 312 have a frusto-conical shape, theshapes are not limited thereto. More specifically, the pad 311 and thevias 312 may have various shapes, such as the column, frusto-conical,square pole, and square pyramid shapes.

The bonding portion as a part of the wiring structure 020 includes theconductor layer 211, the insulator film 212, and the conductive portion213. The conductive portion 213 includes the pad 321 and the vias 322.As in the insulator film 112, the insulator film 212 may be formed ofthree different insulator layers.

FIG. 2B illustrates an example where four different vias 312 connect tothe pad 311. To bond the bonding members 411 and 421 (semiconductorcomponents 001 and 002, respectively) to each other to electricallyconnect the conductive portions 113 and 213, it is necessary to performheat processing at around 300 to 400 degrees Celsius. In the heatprocessing, there is, however, a concern that, depending on thevolumetric relation between the pad and the vias in the conductiveportion, the influence of the volumetric thermal expansion of the viasincreases and causes the detachment on the bonding surface 400. Whencomparing the insulator film 112 and the vias 312 under the pad 311, thethermal expansion coefficient of the vias 312 is larger than that of theinsulator film 112. Thus, to reduce the influence of the thermalexpansion under the pad 311, it is more effective to reduce the volumeof the vias 312 than to reduce the volume of the insulator film 112positioned under the pad 311.

The configuration of the conductive portion 113 will be described indetail below. The conductive portion 113 includes the copper region 3111mainly made of copper for forming the pad 311, and the copper region3121 mainly made of copper for forming the vias 312. The conductiveportion 113 includes the barrier metal portion 3112 between the copperregion 3111 and the insulator film 112, and the barrier metal portion3122 between the copper region 3121 and the insulator film 112. Thecopper region 3111 is continuous to the copper region 3121. The barriermetal portion 3112 is continuous to the barrier metal portion 3122. Thebarrier metal portions 3112 and 3112 are parts of the continuous barriermetal film 3102.

The insulator film 112 can be a stacked film including the insulatorlayers 1121, 1122, and 1123. The insulator layer 1123 is disposedbetween the insulator layer 1121 and the semiconductor layer 100 in thestacking direction Z. The insulator layer 1122 is disposed between theinsulator layers 1121 and 1123 in the stacking direction Z. Theinsulator layer 1121 surrounds the pad 311 in the X-Y plane. Theinsulator layer 1123 surrounds the vias 312 in the X-Y plane in thestacking direction Z. The insulator layer 1122 includes a padsurrounding portion which surrounds the pad 311 in the X-Y plane. Theinsulator layer 1122 includes the via surrounding portion positionedbetween the insulator layer 1123 and the pad 311 in the X-Y plane.

The insulator layers 1121 and 1123 are silicon oxide layers mainly madeof silicon (Si) and O (oxygen). The insulator layer 1122 is a siliconnitride layer mainly made of silicon (Si) and N (nitrogen). Theinsulator layer 1122 may be a silicon carbide layer mainly made ofsilicon (Si) and carbon (C). The silicon oxide layer can contain Si, O,and element(s) other than light elements. Examples of the element(s)other than the light elements include carbon (C), nitrogen (N), fluorine(F), chlorine (Cl), argon (Ar), boron (B), phosphorus (P), and sulfur(S) with a smaller concentration than Si and O. The silicon nitridelayer can contain Si, N, and any of the element(s) other than the lightelements, such as carbon (C), oxygen (O), fluorine (F), chlorine (Cl),argon (Ar), boron (B), phosphorus (P), and sulfur (S), with a smallerconcentration than Si and N. The silicon oxide layer, the siliconnitride layer, and the silicon carbide layer can contain light elements,such as hydrogen (H), with a larger or smaller concentration than Si, O,N, and C. As described above, the insulator layer 1122 mainly made of anelement different from the main component of the insulator layer 1121can operate as an etching stopper in forming a trench corresponding tothe pad 311 through etching. More specifically, the presence of theinsulator layer 1122 makes it possible to form the pad 311 and the vias312 with suitable thicknesses. The insulator layer 1122 as a siliconnitride layer or silicon carbide layer included in the insulator film112 prevents copper contained in the conductive portion 213 of thebonding member 421 as a member to be bonded from diffusing into theinsulator layer 1123. Similarly, the insulator layer as a siliconnitride layer or silicon carbide layer contained in the insulator film212 prevents copper contained in the conductive portion 113 fromdiffusing.

As illustrated in FIG. 2A, it is defined that the insulator layer 1121has a thickness Fa, and the pad surrounding portion surrounding the pad311 in the insulator layer 1122 has a thickness Fb. Further, it isdefined that the via surrounding portion surrounding the vias 312 andoverlapping with the pad 311 in the insulator layer 1122 has a thicknessFc, and the portion surrounding the around vias 312 and overlapping withthe pad 311 (when viewed from the stacking direction Z) in the insulatorlayer 1123 has a thickness Fd. In the etching of the insulator film 112in forming a recessed portion (trenches and holes to be described below)where the conductive portion 113 is disposed, the insulator film 112 maybe etched so that the thickness Fe is 0. However, it is desirable toform and etch each insulator layer so that at least two of Fa, Fb, Fc,and Fd satisfy at least a part of the relation Fd>Fb>Fa≥Fe>0. Forexample, at least one of Fa<Fd, Fc<Fb, Fa<Fb, and Fe<Fd may besatisfied. The relation Fa<Fd indicates the comparison of thethicknesses of the two silicon oxide layers (insulator layers 1121 and1123). To prevent the metal (copper) of the conductive portion 113 fromdiffusing into the insulator layer 1121 in proximity to the bondingsurface 400, it is desirable that the insulator layer 1121 is thin. Toimprove the flatness of the insulator layer 1122 in proximity to theconductor layer 111 compared with other insulator layers 1121 and 1122,it is desirable that the insulator layer 1122 is thick. As a result, therelation Fa<Fd can be satisfied. The relation Fc<Fb indicates thecomparison of the thicknesses of the etched portion and the non-etchedportion of the etching stopper (insulator layer 1122). The insulatorlayer 1122 as a silicon nitride layer or silicon carbide layer provideshigher density and larger stress than the insulator layers 1121 and 1122as silicon oxide layers. Thus, it is desirable that the volume existingin proximity to the bonding surface 400 is as small as possible.Accordingly, it is desirable that the etched portion is thicker than thenon-etched portion. As a result, the relation Fc<Fb can be satisfied.The relation Fa<Fb indicates the comparison of the thicknesses of theinsulator layers 1121 and 1122 existing around the pad 311. Thecontrollability for the shape of the pad 311 can be improved by definingthe shape of the pad 311 by using the insulator layer 1122 as an etchingstopper. For example, when Fa is larger than Fb (Fa>Fb), the insulatorlayer 1121 is over-etched in etching of the insulator layer 1122, andthe trench width of the insulator layer 1121 is likely to be larger thanthat of the insulator layer 1122. When Fb is larger than Fa (Fa<Fb) isapplied, the side surface of the trench where the pad 311 is disposedcan be brought close to the perpendicular, which is advantageous to theminiaturization of the pad 311. The relation Fc<Fd indicates thecomparison of the thicknesses of the insulator layers 1122 and 1123existing around the vias 312. To satisfy the above-described Fa<Fd,Fc<Fb, and Fc<Fd, it is realistic to satisfy Fc<Fd.

The thickness Fa of the insulator layer 1121 is, for example, 100 to 300nm. The thickness Fb+Fc of the insulator layer 1122 is, for example, 300to 500 nm. The thickness Fd of the insulator layer 1123 is, for example,400 to 800 nm, the thickness Fb is, for example, 200 to 400 nm, and thethickness Fc is, for example, 50 to 150 nm.

The configuration of the conductive portion 213 will be described indetail below. The conductive portion 213 includes a copper region 3211mainly made of copper for forming the pad 321, and a copper region 3221mainly made of copper for forming the vias 322. The conductive portion213 includes a barrier metal portion 3212 positioned between the copperregion 3211 and the insulator film 112, and a barrier metal portion 3222positioned between the copper region 3221 and the insulator film 112.The copper region 3211 is continuous to the copper region 3221. Thebarrier metal portion 3212 is continuous to the barrier metal portion3222. The barrier metal portions 3212 and 3212 are parts of thecontinuous barrier metal film 3202. One pad 321 is surrounded by theinsulator film 112 in the X-Y plane. The contour of one pad 321coincides with the contour of the insulator film 212 surrounding the onepad 321. Mb vias 322 (Mb is a natural number) are connected to one pad321 included in each conductive portion 213. While Mb is 4 in thepresent exemplary embodiment, Mb may be 1 or 2. Although it is desirablethat Mb is equal to Ma, Ma and Mb may be different. The above-describedlength La and width Wa indicate the length and the width of one via outof the Ma vias 322. If Ma is larger than two (Ma>2) and one via has thelength La and the width Wb, the other vias do not necessarily need tocoincide with the length La and the width Wa but it is desirable thatthe other vias coincide with the length La and the width Wb.

The insulator film 212 can be a stacked film including the insulatorlayers 2121, 2122, and 2123. The insulator layer 2123 is disposedbetween the insulator layer 2121 and the semiconductor layer 200 in thestacking direction Z. The insulator layer 2122 is disposed between theinsulator layers 2121 and 2123 in the stacking direction Z. Theinsulator layer 2121 surrounds the pad 321 in the X-Y plane. Theinsulator layer 2123 surrounds the vias 322 in the X-Y plane in thestacking direction Z. The insulator layer 2122 includes a padsurrounding portion which surrounds the pad 321 in the X-Y plane. Theinsulator layer 2122 is positioned between the insulator layer 2123 andthe pad 321 in the X-Y plane and includes the via surrounding portionwhich surrounds the vias 322.

The insulator layer 2121 has a thickness Fe, the pad surrounding portionof the insulator layer 2122 has a thickness Ff, the via surroundingportion of the insulator layer 2122 has a thickness Fg, and the portionof the insulator layer 2123 overlapping with the pad 321 has a thicknessFh. As in the insulator film 112, it is desirable that etching isperformed so that at least two of Fe, Ff, Fg, and Fh satisfy at least apart of the relation Fh>Ff>Fe≥Fg>0.

According to the present exemplary embodiment, the distance Da betweenthe semiconductor layer 100 and the conductive portion 213 is largerthan the distance Db between the semiconductor layer 200 and theconductive portion 113 (Da>Db). When the distance Da is larger than thedistance Db, the resistance of the interlayer wiring in the wiringstructure 010 can be larger than the resistance thereof in the wiringstructure 020. Thus, the vias 312 of the bonding member 411 included inthe wiring structure 010 are configured so as to provide a lowerresistance than the vias 322 of bonding member 421 included in thewiring structure 020. This enables reducing the unbalance between theresistance of the interlayer wiring in the wiring structure 010 and theresistance thereof in the wiring structure 020 even if the distance Dais larger than the distance Db. The distance Da between thesemiconductor layer 100 and the conductive portion 213 may be equal tothe distance Db between the semiconductor layer 200 and the conductiveportion 113 (Da=Db). This enables reducing the unbalance between theresistance of the interlayer wiring in the wiring structure 010 and theresistance thereof in the wiring structure 020. The present exemplaryembodiment is also applicable to a case where the number of wiringlayers, Na, is larger than the number of wiring layers, Nb, (Na>Nb).

According to the present exemplary embodiment, the number of wiringlayers, Na, between the semiconductor layer 100 and the conductiveportion 113 is three (Na=3), namely, the conductor layer 111 and thewiring layers 107 and 105. The number of wiring layers, Nb, between thesemiconductor layer 200 and the conductive portion 213 is three (Nb=3),namely, the conductor layer 211 and the wiring layers 207 and 205.Accordingly, the relation Na=Nb results. This enables reducing theunbalance between the resistance of the interlayer wiring in the wiringstructure 010 and the resistance thereof in the wiring structure 020.The number of wiring layers, Na, between the semiconductor layer 100 andthe conductive portion 113 may be larger than the number of wiringlayers, Nb, between the semiconductor layer 200 and the conductiveportion 213 (Na>Nb). When the number of wiring layers, Na, is largerthan the number of wiring layers, Nb, the resistance of the interlayerwiring in the wiring structure 010 can be larger than the resistancethereof in the wiring structure 020. Thus, the vias 312 of the bondingmember 411 included in the wiring structure 010 are configured so as toprovide a lower resistance than the vias 322 of the bonding member 421included in the wiring structure 020. This enables reducing theunbalance between the resistance of the interlayer wiring in the wiringstructure 010 and the resistance thereof in the wiring structure 020even if the number of wiring layers, Na, is larger than the number ofwiring layers, Nb. The present exemplary embodiment is also applicableto a case where the number of wiring layers, Na, is smaller than thenumber of wiring layers, Nb, (Na<Nb).

The semiconductor layer 100 is provided with an element isolationportion 101 and a plurality of transistors. The surface where theplurality of transistors is provided out of a plurality of surfaces ofthe semiconductor layer 100 is the principal surface of thesemiconductor layer 100. The principal surface may be referred to as asurface, and the surface opposite to the principal surface may also bereferred to as a rear surface. In a semiconductor apparatus APR as aphotoelectric conversion apparatus, the integrated circuit of thesemiconductor layer 100 can include signal processing circuits for pixelsignal processing, such as an analog signal processing circuit, ananalog-to-digital (AD) conversion circuit, a noise removal circuit, anda digital signal processing circuit. The semiconductor layer 100 can bereferred to as a “substrate” or “semiconductor substrate”.

The element isolation portion 101 has the Shallow Trench Isolation (STI)structure and defines an element region (active region) of thesemiconductor layer 100. A plurality of transistors 120 can configure acomplementary metal oxide semiconductor (CMOS) circuit. A source/drain121 of a transistor 120 can have a silicide layer 122, such as a cobaltsilicide layer or nickel silicide layer. The gate electrode 102 of thetransistor 120 can have a silicide layer, metal layer, and metalcompound layer. The gate insulating film of the transistor 120 can be asilicon oxide film, silicon nitride film, or metal oxide film.

The semiconductor layer 200 is provided with element isolation portions201, gate electrodes 202, photodiodes 220, and sources/drains 221. Thesurface where a plurality of transistors is provided out of a pluralityof surfaces of the semiconductor layer 200 is the principal surface ofthe semiconductor layer 200. The principal surface may be referred to asa surface, and the surface opposite to the principal surface may bereferred to as a rear surface. The semiconductor layer 200 can bereferred to as a “substrate” or “semiconductor substrate”.

The element isolation portion 201 has the STI structure and defines anelement region (active region) of the semiconductor layer 200. The gateelectrode 202 transfers charges of the photodiode 220 to the floatingdiffusion. The semiconductor layer 200 is provided with a pixel circuitfor converting charges generated by the photodiode 220 into a pixelsignal. The pixel circuit can include pixel transistors, such as a resettransistor, amplification transistor, and selection transistor. A pixelsignal according to the charges transferred to the floating diffusion isgenerated by the amplification transistor. The potential of the floatingdiffusion is reset to the reset potential by the reset transistor.

The conductive portion 113 is electrically connected to thesemiconductor layer 100 via the silicide layer 122 as a cobalt silicidelayer or nickel silicide layer. According to the present exemplaryembodiment, the contact plug 104, to which the conductive portion 113 isconnected, is formed through a salicide process and is in contact with asilicide layer 1001 spreading between the interlayer insulating film 103and the semiconductor layer 100. On the other hand, the conductiveportion 213 is electrically connected to the semiconductor layer 200without going through a silicide layer as a cobalt silicide layer ornickel silicide layer. According to the present exemplary embodiment,the contact plug 204, to which the conductive portion 213 is connected,is in contact (ohmic contact) with the semiconductor region of thesemiconductor layer 100 formed without going through a salicide process.Alternatively, the conductive portion 213 may be electrically connectedto the semiconductor layer 200 via a silicide layer made of titaniumsilicide or tungsten silicide locally formed under the contact plug 204.When the conductive portion 113 connects with the semiconductor layer100 via the silicide layer 1001, the contact resistance can become lowcompared with a case where the conductive portion 213 is connected tothe semiconductor layer 200 without going through a silicide layer orvia a locally formed silicide layer. Thus, as described above, suchunbalance can be reduced by disposing the silicide layer 1001 in thewiring structure 010 (in the semiconductor layer 100) even if Da islarger than Db (Da>Db) or Na is larger than Nb (Na>Nb).

According to the present exemplary embodiment, the semiconductorcomponent 001 includes a digital circuit, and the semiconductorcomponent 002 includes an analog circuit. The semiconductor component001 may include an analog circuit, and the semiconductor component 002may include a digital circuit. According to the present exemplaryembodiment, the semiconductor layer 200 is provided with a photodiode. Aphotodiode may be provided not on the semiconductor layer 200 but on thesemiconductor layer 100. The photodiode provided on the semiconductorlayer 200 is connected to the floating diffusion via a transfer gate.The floating diffusion is connected to the gate of a source followertransistor. An analog pixel signal is output from the source of thesource follower transistor. The pixel circuit including the transfergate and the source follower transistor can be the analog circuitincluded in the semiconductor component 002. The analog pixel signal issubjected to AD conversion into a digital pixel signal by the ADconversion circuit. The digital pixel signal is subjected to signalprocessing by a digital signal processing (DSP) circuit. The digitalsignal processing circuit that performs image processing can be an imageprocessing (ISP) circuit. This digital signal processing circuit can bethe digital circuit included in the semiconductor component 001. Inaddition, the digital circuit included in the semiconductor component002 can be an interfacing circuit such as a Low Voltage DifferentialSignaling (LVDS) circuit and a Mobile Industry Processor Interface(MIPI) circuit.

In the semiconductor apparatus APR used as a photoelectric conversionapparatus, a metal oxide film 511, an antireflection film 512, aninsulating film 513, a color filter 514, and a micro lens 515 aredisposed on the semiconductor layer 200. The insulating film 513 caninclude, for example, a shading film for forming an optical black (OB)region, for example, with a metal film made of tungsten, and a shadingwall for light separation to prevent color mixing of light for eachpixel. The semiconductor apparatus APR according to the presentexemplary embodiment is a CMOS image sensor of the rear surfaceirradiation type with the rear surface of the semiconductor layer 200 asa light receiving surface. The semiconductor apparatus APR according tothe present invention is, however, not limited to an image sensor. Forexample, a semiconductor component having an operation circuit and asemiconductor component having a storage circuit may be stacked.Alternatively, a semiconductor component having an operation circuitand/or a memory circuit, and a semiconductor component having a controlcircuit for controlling the former semiconductor component may bestacked. The operation circuit is, for example, a central processingunit (CPU) or application specific integrated circuit (ASIC), and thestorage circuit is a static random access memory (SRAM) or dynamicrandom access memory (DRAM).

A method for manufacturing the semiconductor apparatus 930 will bedescribed below. A method for manufacturing a wafer 81 for thesemiconductor component 001 and a method for manufacturing a wafer 82for the semiconductor component 002 will be described below. A methodfor manufacturing the semiconductor apparatus 930 using the two wafers81 and 82 will be described below.

A method for manufacturing the wafer 81 for the semiconductor component001 will be described below with reference to FIGS. 3A, 3B, 3C, and 3D.

The wafer 81 for the semiconductor component 001 illustrated in FIG. 3Ais prepared. The wafer 81 includes the semiconductor layer 100, theelement isolation portions 101, the transistors 102 (gate electrodes),the interlayer insulating film 103, and the contact plugs 104. The wafer81 further includes the wiring layer 105, the interlayer insulating film106, the wiring layer 107, and the via plugs 108 for connecting thewiring layers 105 and 107. A typical configuration is available for thewafer 81, and thus, a description of a method for manufacturing thewafer 81 will be omitted. The interlayer insulating film 109 is formedon the interlayer insulating film 106. Examples of the interlayerinsulating film 109 include a silicon oxide film, silicon nitride film,silicon oxynitride film, carbon-containing silicon oxide film, andfluorine-containing silicon oxide film. The layer structure of the filmmay be a single layer structure made of one material or a multilayerstructure made of a plurality of materials.

Trenches are then formed through etching from the surface of theinterlayer insulating film 109, and a conductive portion is formed overthe entire surface through the PVD and Chemical Vapor Deposition (CVD)methods. As a result, the trenches are filled with a conductivematerial. By removing the surface conductive portion through thechemical mechanical polishing and etch back, the via plug 110 is formedon the interlayer insulating film 109, as illustrated in FIG. 3A.

A conductor film is then formed on the interlayer insulating film 109.The material of the conductor film may be aluminum. The conductor filmon the interlayer insulating film 109 is subjected to patterning. Thepatterning is implemented through photolithography and etching, and theconductor layer 111 is formed. While three different layers includingthe wiring layers 105 and 107 and the conductor layer 111 are used inthe present exemplary embodiment, any number of wiring layers can beselected. While only a MOS transistor is disposed on the surface of thesemiconductor layer 100 in the present exemplary embodiment, the presentexemplary embodiment is not limited thereto. For example, a MOScapacitor, a trench capacitor, a resistor using part of thesemiconductor layer 100, and a resistor using the transistor 102 (gateelectrode) can be disposed. A Metal-Insulator-Metal (MIM) capacitor canalso be disposed between wiring layers.

The insulator film 112 is then formed on the interlayer insulating film109. Examples of the insulator film 112 include a silicon oxide film,silicon nitride film, silicon oxynitride film, carbon-containing siliconoxide film, and fluorine-containing silicon oxide film. For example,dimensional variations of the conductive portion 113 can be reduced byforming a silicon oxide film and then performing flattening through thechemical mechanical polishing.

A plurality of recessed portions 1130 for embedding a conductivematerial is then formed on the insulator film 112 as illustrated in FIG.3B. At least part of the plurality of the recessed portions 1130 isformed to reach the conductor layer 111. These recessed portions 1130are disposed with an appropriate concentration over the entire chip. Arecessed portion 1130 is formed of a trench 1311 corresponding to thepad 311 and a hole (via hole) 1312 corresponding to a via 312 in therecessed portion 1130. An etching method for dual damascene can beadopted for forming the recessed portions 1130. Applicable methods forforming the recessed portions 1130 include a via first method forforming the hole 1312 and then forming the trenches 1311, a trench firstmethod for forming the trenches 1311 and then forming the hole 1312, anda method for forming the hole 1312 and the trenches 1311 at the sametime. To improve the precision of shape control for the vias 312, it isdesirable to firstly form a resist pattern defined by a photomaskcorresponding to the hole 1312 and then form a resist pattern defined bya photomask corresponding to the trenches 1311. For the portions whererecessed portions 1140 corresponding to the conductive portions 114 areformed, in forming the trenches 1311, the recessed portions 1140corresponding to the conductive portions 114 may be formed, and maskthese portions in forming the hole 1312.

At this timing, the recessed portions 1130 are formed on the conductiveportions 113 when the recessed portions 1130 are filled with aconductive material in the following process. For this reason, it isdesirable that the recessed portion 1130 is formed so that the volumesand thicknesses of the trench 1311 corresponding to the pad 311 and thehole (through-hole) 1312 corresponding to the via 312 in the recessedportion 1130 satisfy the following relation. It is desirable that thedepth of the hole 1312 is larger than the depth of the trench 1311.

As illustrated in FIG. 3C, a conductive material 1131 is formed over theentire surface. In this case, the recessed portion 1130 is filled withthe conductive material 1131. The material of the conductive material1131 can be copper.

As illustrated in FIG. 3D, excesses of the conductive material 1131 isremoved through the chemical mechanical polishing method to form theconductive portions 113. More specifically, the pads 311 and the vias312 disposed at the bottom of the pads 311 are formed. The thickness Taof the pad 311 of the conductive portion 113 coincides with the depth ofthe trench 1311. The length La of the via 312 coincides with the depthof the hole 1312 from the bottom of the trench 1311. The width Pa of thepad 311 coincides with the width of the trench 1311, and the width Wa ofthe via 312 coincides with the width of the hole 1312. If the dimensionsof the trench 1311 and the hole 1312 in the recessed portion 1130 havebeen adjusted, the conductive portion 113 satisfying the above-describedrelation can be formed. Through the above-described process, the wafer81 for the semiconductor component 001 before the bonding is completed.Since the conductive portions 113 are formed with an appropriateconcentration over the entire chip in this chemical mechanicalpolishing, dishing and erosion due to the chemical mechanical polishingare prevented. This improves the flatness of the surface of the wafer 81for the semiconductor component 001 before the bonding, thus improvingyield in the wafer bonding. The uppermost surface of the wafer 81 forthe semiconductor component 001 can include the conductive portions 113and the insulator film 112 in a flattened state. More specifically, thedistance from the uppermost surface of the wafer 81 for thesemiconductor component 001 to the conductive portions 113 and theinsulator film 112 can be zero. However, a semiconductor wafer may bestored or shipped in a state where a coating film for covering theconductive portions 113 and the insulator film 112 are formed, beforeperforming bonding (described below). The thickness of the coating filmmay be smaller than the thickness of the pads 311, for example, 500 nmor less, 50 nm or less, or 5 nm or more. The thickness of the coatingfilm can be equivalent to the distance from the uppermost surface (mostfront surface) of the wafer 81 for the semiconductor component 001 tothe conductive portions 113 and the insulator film 112. The distancefrom the uppermost surface of the wafer 81 for the semiconductorcomponent 001 to the conductive portions 113 and the insulator film 112may be smaller than the thickness of the pads 311, for example, 500 nmor less, 50 nm or less, or 5 nm or more.

A method for manufacturing the wafer 82 for the semiconductor component002 will be described below with reference to FIGS. 4A, 4B, 4C, and 4D.

The wafer 82 as a part of the wafer 82 for the semiconductor component002 illustrated in FIG. 4A is prepared. The wafer 82 includes thesemiconductor layer 200, the element isolation portions 201, the gateelectrodes 202, the interlayer insulating film 203, and the contactplugs 204. The semiconductor layer 200 is provided with the photodiodes220 and the sources/drains 221. The wafer 82 further includes the wiringlayer 205, the interlayer insulating film 206, the wiring layer 207, andthe via plugs 208 for connecting the wiring layers 205 and 207. Thewafer 82 further includes the interlayer insulating film 209, theconductor layer 211, and the via plugs 210 for connecting the wiringlayer 207 and 211. The wafer 82 can be manufactured through a typicaltechnique, and thus, a description of a method for manufacturing thewafer 82 will be omitted.

While only a MOS transistor is disposed on the surface of thesemiconductor layer 200 in the present exemplary embodiment, the elementto be disposed is not limited thereto. For example, a MOS capacitor, atrench capacitor, a resistor using part of the semiconductor layer 200,and a resistor using the gate electrode 202 can be disposed. An MIMcapacitor can also be disposed between wiring layers.

The insulator film 212 is formed on the interlayer insulating film 209.Examples of the insulator film 212 include a silicon oxide film, siliconnitride film, silicon oxynitride film, carbon-containing silicon oxidefilm, and fluorine-containing silicon oxide film.

Then, as illustrated in FIG. 4B, a plurality of the recessed portions2130 for embedding a conductive material is formed on the insulator film212. At least a part of the plurality of the recessed portions 2130 isformed to reach the conductor layer 211. These recessed portions 2130are disposed with an appropriate concentration over the entire chip. Forthis reason, it is desirable that the volumes and thicknesses of atrench 2311 corresponding to the pad 321 and a hole 2322 correspondingto a via 322 in the recessed portion 2130 satisfy the above-describedrelation. The recessed portion 2130 may be formed through a methodsimilar to the above-described method for the recessed portion 2130corresponding to the conductive portion 213 and a recessed portion 2140corresponding to the conductive portion 214.

As illustrated in FIG. 4C, a conductive material 2131 is formed over theentire surface of the insulator film 212. In this case, the recessedportion 2130 is filled with the conductive material 2131. The materialof the conductive material 2131 can be copper.

As illustrated in FIG. 4D, excesses of the conductive material 2131 isremoved through the chemical mechanical polishing method, and theconductive portions 213 connected to the conductor layer 211 is formed.More specifically, the pad 321 and the via 322 disposed at the bottom ofpad 321 are formed. The thickness Tb of the pad 321 of the conductiveportion 213 coincides with the depth of the trench 2321. The length Lbof the via 322 coincides with the depth of the hole 2322 from the bottomof the trench 2321. The width Pb of the pad 321 coincides with the widthof the trench 2321, and the width Wb of the via 322 coincides with thewidth of hole 2322. If the dimensions of the trench 2321 and the hole2322 in the recessed portion 2130 have been adjusted, the conductiveportion 213 satisfying the above-described relation can be formed. Withthe above-described process, the wafer 82 for the semiconductorcomponent 002 before the bonding is completed. The recessed portions2130 are disposed over the entire chip in this chemical mechanicalpolishing, and thus, dishing and erosion through the chemical mechanicalpolishing are prevented. This improves the flatness on the surface ofthe wafer 82 for the semiconductor component 002 before the bonding. Theuppermost surface of the wafer 82 for the semiconductor component 002can include the conductive portions 213 and the insulator film 212 in aflattened state. More specifically, the distance from the uppermostsurface of the wafer 82 for the semiconductor component 002 to theconductive portion 213 and the insulator film 212 can be zero. However,a semiconductor wafer may be stored or shipped in a state where acoating film for covering the conductive portions 213 and the insulatorfilm 212 are formed before performing bonding (described below). Thethickness of the coating film may be smaller than the thickness of thepad 321, for example, 500 nm or less, 50 nm or less, or 5 nm or more.The thickness of the coating film can be equivalent to the distance fromthe uppermost surface of the wafer 82 for the semiconductor component002 to the conductive portions 213 and the insulator film 212. Thedistance from the uppermost surface of the wafer 82 for thesemiconductor component 002 to the conductive portion 213 and theinsulator film 212 may be smaller than the thickness of the pad 321, forexample, 500 nm or less, 50 nm or less, or 5 nm or more.

A method for manufacturing the semiconductor apparatus 930 will bedescribed below with reference to FIG. 5. As illustrated in FIG. 5, thewafer 82 for the semiconductor component 002 is reversed, and the wafer81 for the semiconductor component 001 and the wafer 82 for thesemiconductor component 002 are bonded to each other on the bondingsurface 400. In the resultant structure after the bonding, the wafer 82for the semiconductor component 002 is stacked on the wafer 81 for thesemiconductor component 001. For example, in wafer bonding, theinsulator films 112 and 212 on the bonding surface of the wafer areactivated through plasma activation, and then the activated insulatorfilms 112 and 212 are bonded to each other, resulting in the temporarybonding of the semiconductor wafers 81 and 82. Then, for example, whenheat processing at 350 degrees Celsius is performed, the insulator films112 and 212 on the bonding surface 400 are more solidly bonded to eachother than in the temporary bonding. The conductive portions 113 and 213are bonded to each other through mutual diffusion of copper between theconductive portions 113 and 213. The bonding of the insulator films 112and 212 can be implemented through chemical bonding, such asintermolecular forces and covalent bonding, fusion-based unification ofthe insulator films 112 and 212, and the adhesion by an adhesivematerial. The insulator films 112 and 212 may be separate from eachother. The bonding of the conductive portions 113 and 213 can beimplemented through metallic bonding. In the heat processing for bondingsemiconductor components 001 and 002, the above-described techniqueenables preventing the detachment from the bonding interface due to theinfluence of the thermal expansion of the conductive portion 113 or 213.Thus, the bonding reliability of the semiconductor apparatus APR can beimproved.

The lengths of the vias 312 and 322 are defined to satisfy the relationLa<Lb. Defining the widths of the vias 312 and 322 to satisfy therelation Wa>Wb enables reducing the junction resistance between thebonding portion and the wiring layer and preventing the resistancevariation while improving the bonding reliability in the semiconductorapparatus. Alternatively, defining the thicknesses of the pads 311 and321 to satisfy the relation Ta>Tb enables reducing the junctionresistance between the bonding portion and the wiring layer andpreventing the resistance variation while improving the bondingreliability in the semiconductor apparatus. Making the ratio of thelength La to the length Lb smaller than the ratio of the thickness Ta tothe thickness Tb (La/Lb<Ta/Tb) enables preventing the detachment fromthe bonding surface 400 under the influence of the thermal expansion ofthe conductive portions. Further, making the difference between thelengths La and Lb larger than the difference between the thicknesses Taand Tb enables preventing the detachment from the bonding surface 400due to the influence of the thermal expansion of the conductiveportions. This is because the volumes of the vias are relatively smallerthan the volumes of the trenches in the conductive portions 113 and 213.When the lengths of the vias 312 and 322 are defined to satisfy therelation La<Lb, the definition is made so that the ratio of the lengthLa to the length Lb is larger than the ratio of the thickness Tb to thethickness Ta (Tb/Ta<La/Lb). This enables preventing the detachment fromthe bonding surface 400 due to the influence of the thermal expansion ofthe conductive portions. Further, making the difference between thelengths La and Lb larger than the difference between the thicknesses Taand Tb enables preventing the detachment from the bonding surface 400due to the influence of the thermal expansion of the conductiveportions. This is because the volumes of the vias are relatively smallerthan the volumes of the trenches in the conductive portions 113 and 213.

For example, in the case of Na>Nb, satisfying the relation La<Lb enablesreducing the junction resistance between the bonding portion and thewiring layer and preventing the resistance variation while improving thereliability of the bonding portion in the semiconductor apparatus.Similarly, satisfying the relation Wa>Wb enables reducing the junctionresistance between the bonding portion and the wiring layer andpreventing the resistance variation while improving the reliability ofthe bonding portion in the semiconductor apparatus.

In the case of Da>Db, satisfying the relation La<Lb enables reducing thejunction resistance between the bonding portion and the wiring layer andpreventing the resistance variation while improving the reliability ofthe bonding portion in the semiconductor apparatus. Similarly,satisfying the relation Wa>Wb enables reducing the junction resistancebetween the bonding portion and the wiring layer and preventing theresistance variation while improving the reliability of the bondingportion in the semiconductor apparatus.

For example, in the case of Na<Nb, satisfying the relation La>Lb enablesreducing the junction resistance between the bonding portion and thewiring layer and preventing the resistance variation while improving thereliability of the bonding portion in the semiconductor apparatus.Similarly, satisfying the relation Wa<Wb enables reducing the junctionresistance between the bonding portion and the wiring layer andpreventing the resistance variation while improving the reliability ofthe bonding portion in the semiconductor apparatus.

Further, in the case of Da<Db, satisfying the relation La>Lb enablesreducing the junction resistance between the bonding portion and thewiring layer and preventing the resistance variation while improving thereliability of the bonding portion in the semiconductor apparatus.Similarly, satisfying the relation Wa<Wb enables reducing the junctionresistance between the bonding portion and the wiring layer andpreventing the resistance variation while improving the reliability ofthe bonding portion in the semiconductor apparatus.

As illustrated in FIG. 1A, the thickness of the semiconductor layer 200is thinned to several ten to several μm. Examples of thinning methodsinclude back grind, chemical mechanical polishing, and etching. Themetal oxide film 511, the antireflection film 512, and the insulatingfilm 513 are formed on the surface of the semiconductor layer 200 of thewafer 82 for the semiconductor component 002. The metal oxide film 511is, for example, a hafnium oxide film and aluminum oxide film. Theantireflection film 512 is, for example, a tantalum oxide film. Theinsulating film 513 can be selected from any materials generally used inthe semiconductor apparatus. Examples of the materials of the insulatorfilm 513 include a silicon oxide film, silicon nitride film, siliconoxynitride film, carbon-containing silicon oxide film, andfluorine-containing silicon oxide film. The layer structure of the filmmay be a single layer structure made of one material or a multilayerstructure made of a plurality of materials. Although not illustrated,the insulating film 513 may include therein, for example, a shading filmfor forming an OB region, for example, with a metal film made oftungsten, and a shading wall for light separation to prevent colormixing of light for each pixel. The color filter 514 and the micro lens515 may be formed on the semiconductor layer 200. Apertures (padapertures) reaching pad electrodes included in the wiring structure 010or 020 may be formed on the semiconductor layer 200. A through-via (TSV)penetrating through the semiconductor layer 100 and connecting to anelectrode included in the wiring structure 010 or 020 may be formed onthe semiconductor layer 100.

Subsequently, a stacked body of the two semiconductor wafers bonded toeach other via the conductive portions 113 and 213 is diced to beindividualized to a plurality of semiconductor device ICs. In each ofthe semiconductor device ICs individualized in this way, thesemiconductor component 001 as a chip acquired from the wafer 81 for thesemiconductor component 001 and the semiconductor component 002 as achip acquired from the wafer 82 for the semiconductor component 002 arestacked (bonded to each other). Although the present exemplaryembodiment has been described above centering on the semiconductorapparatus 930 including the two stacked (bonded) semiconductorcomponents 001 and 002, the semiconductor apparatus 930 may includethree or more stacked (bonded) semiconductor components. In such a case,elements (semiconductor components) are also bonded to one another withconductive portions and insulating films. The bonding reliability can beimproved by applying the above-described favorable bonding conditions tothe conductive portions. Although the present exemplary embodiment hasbeen described above centering on a form in which semiconductorcomponents are bonded to each other at the wafer level and then thewafers are diced, each wafer may be separately diced to acquire chipsand then the chips may be bonded to each other.

The device 9191 including the semiconductor apparatus 930 as illustratedin FIG. 1B will be described in detail below. The semiconductorapparatus 930 can include the package 920 for storing the semiconductordevice 910, in addition to the semiconductor device 910 having thesemiconductor layer 100 as described above. The package 920 can includea base substrate with the semiconductor device 910 fixed thereon, and alid, such as glass facing the semiconductor device 910. The package 920can further include bonding members, such as a bonding and a bump forconnecting terminals on the base substrate and terminals on thesemiconductor device 910.

The device 9191 can include at least any of the optical apparatus 940,the control apparatus 950, the processing apparatus 960, the displayapparatus 970, the storage apparatus 980, and the mechanical apparatus990. The optical apparatus 940 corresponds to the semiconductorapparatus 930. The optical apparatus 940 is, for example, a lens,shutter, or mirror. The control apparatus 950 controls the semiconductorapparatus 930. The control apparatus 950 is, for example, asemiconductor apparatus, such as an ASIC.

The processing apparatus 960 processes the signal output from thesemiconductor apparatus 930. The processing apparatus 960 is asemiconductor apparatus, such as a CPU and ASIC, for configuring anAnalog Front End (AFE) or Digital Front End (DFE). The display apparatus970 is an electroluminescence (EL) display apparatus or liquid crystaldisplay apparatus for displaying information (images) acquired by thesemiconductor apparatus 930. The storage apparatus 980 is a magneticapparatus or semiconductor apparatus for storing information (images)acquired by the semiconductor apparatus 930. The storage apparatus 980is a volatile memory, such as an SRAM and DRAM, or a nonvolatile memory,such as a flash memory and hard disk drive.

The mechanical apparatus 990 includes motors, engines, and other movablemembers or driving members. The device 9191 displays the signal outputfrom the semiconductor apparatus 930 on the display apparatus 970, andtransmits the signal to the outside through a communication unit (notillustrated) included in the device 9191. Thus, it is desirable that thedevice 9191 further includes the storage apparatus 980 and theprocessing apparatus 960 in addition to the storage circuit and theoperation circuit included in the semiconductor apparatus 930. Themechanical apparatus 990 may be controlled based on the signal outputfrom the semiconductor apparatus 930.

The device 9191 is suitable for electronic devices, such as informationterminals having image capturing functions (e.g., smart phones andwearable terminals) and cameras (e.g., lens exchange-type cameras,compact cameras, video cameras, and monitoring cameras). The mechanicalapparatus 990 in a camera can drive the parts of the optical apparatus940 to perform zooming, focusing, and shutter. Alternatively, themechanical apparatus 990 in a camera can move the semiconductorapparatus 930 to perform anti-vibration operations.

The device 9191 can be a transportation device, such as a vehicle, ship,and flying object. The mechanical apparatus 990 in a transportationdevice can be used as a moving apparatus. The device 9191 as atransportation device is suitable for transporting the semiconductorapparatus 930 and assisting and/or automating operations (maneuvers)using image capturing functions. The processing apparatus 960 forassisting and/or automating operations (maneuvers) can performprocessing for operating the mechanical apparatus 990 as a movingapparatus based on information acquired by the semiconductor apparatus930. Alternatively, the device 9191 may be a medical device, such as anendoscope, a measurement device, such as a distance measuring sensor, ananalytical device, such as an electron microscope, and a businessdevice, such as a copying machine.

According to the present exemplary embodiment, the unbalance in thewiring resistance between the semiconductor components 001 and 002 canbe reduced. Thus, it is possible to improve the bonding reliability fora plurality of parts in the semiconductor apparatus 930.

Accordingly, the use of the semiconductor apparatus according to thepresent exemplary embodiment makes it possible to improve theperformance of semiconductor apparatuses. Thus, for example, if thesemiconductor apparatus according to the present exemplary embodiment ismounted on a transportation devices, excellent reliability can beacquired in capturing images of the outside of the transportation deviceand measuring the external environment. Therefore, in manufacturing andselling transportation devices, determining to mount the semiconductorapparatus according to the present exemplary embodiment ontransportation devices is advantageous to improve the performance oftransportation devices.

The above-described exemplary embodiment can be suitably modifiedwithout departing from the technical concept thereof. The disclosure ofthe above-described exemplary embodiment includes not only thedescriptions of the present specification but also all of the contentsgraspable from the present specification and the drawings attached tothe present specification.

The present disclosure makes it possible to provide a technique which isadvantageous in improving the bonding reliability for a plurality ofparts in a semiconductor apparatus.

While the present disclosure has been described with reference toexemplary embodiments, it is to be understood that the invention is notlimited to the disclosed exemplary embodiments. The scope of thefollowing claims is to be accorded the broadest interpretation so as toencompass all such modifications and equivalent structures andfunctions.

This application claims the benefit of Japanese Patent Application No.2019-039904, filed Mar. 5, 2019, which is hereby incorporated byreference herein in its entirety.

What is claimed is:
 1. A semiconductor apparatus comprising: a firstsemiconductor component including a first semiconductor layer and afirst insulator film over the first semiconductor layer; and a secondsemiconductor component including a second semiconductor layer and asecond insulator film over the second semiconductor layer; wherein thefirst and the second semiconductor layers are stacked so that the firstand the second insulator films are positioned between the first and thesecond semiconductor layers in a first direction, wherein the first andthe second semiconductor components are bonded to each other by a firstconductive portion disposed in a recessed portion formed in the firstinsulator film and a second conductive portion disposed in a recessedportion formed in the second insulator film, wherein the firstconductive portion includes a first pad surrounded by the firstinsulator film in a plane perpendicular to the first direction, and afirst via connected to the first pad so that the first via is positionedbetween the first pad and the first semiconductor layer in the firstdirection, the first via being connected to a first conductor layer inproximity to the first via, the first conductor layer being positionedbetween the first via and the first semiconductor layer in the firstdirection, wherein the second conductive portion includes a second padsurrounded by the second insulator film in a plane perpendicular to thefirst direction, and a second via connected to the second pad so thatthe second via is positioned between the second pad and the secondsemiconductor layer in the first direction, the second via beingconnected to a second conductor layer in proximity to the second via,the second conductor layer being positioned between the second via andthe second semiconductor layer in the first direction, wherein at leastone of the following relations (A), (B), (C), (D), and (E), at least oneof the following relations (α) and (β), and (K) are satisfied:La<Lb,  (A)Wa>Wb,  (B)La/Lb<Ta/Tb,  (C)Pa/Pb<Wa/Wb,  (D)La/Wa<Lb/Wb,  (E) (α) the first conductor layer is mainly made ofaluminum, (β) the second conductor layer is mainly made of copper, and|Ta−Tb|<|La−Lb|,  (K) where La is a dimension of the first via in thefirst direction, Lb is a dimension of the second via in the firstdirection, Ta is a dimension of the first pad in the first direction, Tbis a dimension of the second pad in the first direction, Wa is adimension of the first via in a second direction perpendicular to thefirst direction, Wb is a dimension of the second via in the seconddirection, Pa is a dimension of the first pad in the second direction,and Pb is a dimension of the second pad in the second direction.
 2. Thesemiconductor apparatus according to claim 1, wherein the followingrelation (G) is satisfied:Ta>Tb,  (G)
 3. The semiconductor apparatus according to claim 1, whereineach of a plurality of the first conductive portions comprises: a firstcopper region mainly made of copper for forming the first pad; a secondcopper region mainly made of copper for forming the first via; a firstbarrier metal portion positioned between the first copper region and thefirst insulator film; and a second barrier metal portion positionedbetween the second copper region and the first insulator film, whereinthe first copper region is continuous to the second copper region, andwherein the first barrier metal portion is continuous to the secondbarrier metal portion.
 4. The semiconductor apparatus according to claim1, wherein the first and the second semiconductor components are bondedto each other with the first and the second insulator films.
 5. Thesemiconductor apparatus according to claim 1, wherein the firstconductive portion comprises a via different from the first via, and thevia is connected to the first pad so that the via is positioned betweenthe first pad and the first semiconductor layer in the first direction,and wherein the second conductive portion comprises a via different fromthe second via, and the via is connected to the second pad so that thevia is positioned between the second pad and the second semiconductorlayer in the first direction.
 6. The semiconductor apparatus accordingto claim 1, wherein the first semiconductor component includes a digitalcircuit, and wherein the second semiconductor component includes ananalog circuit.
 7. The semiconductor apparatus according to claim 1,wherein a photodiode is provided with the first or the secondsemiconductor layer.
 8. The semiconductor apparatus according to claim1, wherein the relations (A), (C), (α), and (β) are satisfied.
 9. Asemiconductor apparatus comprising: a first semiconductor componentincluding a first semiconductor layer and a first insulator film overthe first semiconductor layer; and a second semiconductor componentincluding a second semiconductor layer and a second insulator film overthe second semiconductor layer; wherein the first and the secondsemiconductor layers are stacked so that the first and the secondinsulator films are positioned between the first and the secondsemiconductor layers in a first direction, wherein the first and thesecond semiconductor components are bonded to each other by a firstconductive portion disposed in a recessed portion formed in the firstinsulator film and a second conductive portion disposed in a recessedportion formed in the second insulator film, wherein the firstconductive portion includes a first pad surrounded by the firstinsulator film in a plane perpendicular to the first direction, and afirst via connected to the first pad so that the first via is positionedbetween the first pad and the first semiconductor layer in the firstdirection, the first via is connected to a first conductor layerpositioned between the first via and the first semiconductor layer inthe first direction, and a distance between the first via and the firstconductor layer is smaller than a distance between the first via and thesecond conductive portion, wherein the second conductive portionincludes a second pad surrounded by the second insulator film in a planeperpendicular to the first direction, and a second via connected to thesecond pad so that the second via is positioned between the second padand the second semiconductor layer in the first direction, the secondvia is connected to a second conductor layer positioned between thesecond via and the second semiconductor layer in the first direction,and a distance between the second via and the second conductor layer issmaller than a distance between the second via and the first conductiveportion, wherein at least one of the following relations (A), (B), (C),(D), and (E), at least one of the following relations (α) and (β), and(K) are satisfied:La<Lb,  (A)Wa>Wb,  (B)La/Lb<Ta/Tb,  (C)Pa/Pb<Wa/Wb,  (D)La/Wa<Lb/Wb,  (E) (α) the first conductor layer is mainly made ofaluminum, (β) the second conductor layer is mainly made of copper, and|Ta−Tb|<|La−Lb|,  (K) where La is a dimension of the first via in thefirst direction, Lb is a dimension of the second via in the firstdirection, Ta is a dimension of the first pad in the first direction, Tbis a dimension of the second pad in the first direction, Wa is adimension of the first via in a second direction perpendicular to thefirst direction, Wb is a dimension of the second via in the seconddirection, Pa is a dimension of the first pad in the second direction,and Pb is a dimension of the second pad in the second direction.
 10. Thesemiconductor apparatus according to claim 9, wherein La and Lb are 0.7to 0.9 μm, and wherein Ta and Tb are 0.4 to 0.6 μm.
 11. Thesemiconductor apparatus according to claim 9, wherein the firstinsulator film comprises: a first silicon oxide layer; a second siliconoxide layer disposed between the first silicon oxide layer and the firstsemiconductor layer in the first direction; and a silicon nitride layerdisposed between the first and the second silicon oxide layers in thefirst direction, wherein the first silicon oxide layer surrounds thefirst pad in the plane perpendicular to the first direction, and whereinthe second silicon oxide layer surrounds the first via in the planeperpendicular to the first direction.
 12. The semiconductor apparatusaccording to claim 11, wherein the silicon nitride layer comprises: afirst portion surrounding the first pad in the plane perpendicular tothe first direction, and a second portion positioned between the secondsilicon oxide layer and the first pad in the first direction.
 13. Thesemiconductor apparatus according to claim 11, wherein Fa<Fd issatisfied, where Fa is a thickness of the first silicon oxide layer, andFd is a thickness of a portion of the second silicon oxide layeroverlapping with the first pad.
 14. The semiconductor apparatusaccording to claim 12, wherein Fc<Fb is satisfied, where Fb is athickness of the first portion, and Fe is a thickness of the secondportion.
 15. The semiconductor apparatus according to claim 12, whereinFa<Fb and Fc<Fd are satisfied, where Fa is a thickness of the firstsilicon oxide layer, Fb is a thickness of the first portion, Fc is athickness of the second portion, and Fd is a thickness of a portion ofthe second silicon oxide layer overlapping with the first pad.
 16. Thesemiconductor apparatus according to claim 9, wherein a distance betweenthe first semiconductor layer and the first conductive portion is largerthan a distance between the second semiconductor layer and the secondconductive portion, and/or wherein the number of wiring layers betweenthe first semiconductor layer and the first conductive portion is largerthan the number of wiring layers between the second semiconductor layerand the second conductive portion.
 17. The semiconductor apparatusaccording to claim 9, wherein the first conductive portion iselectrically connected to the first semiconductor layer via a cobaltsilicide layer or a nickel silicide layer, and wherein the secondconductive portion is electrically connected to the second semiconductorlayer without going through a cobalt silicide layer or nickel silicidelayer.
 18. A semiconductor apparatus comprising: a first semiconductorcomponent including a first semiconductor layer and a first insulatorfilm over the first semiconductor layer; and a second semiconductorcomponent including a second semiconductor layer and a second insulatorfilm over the second semiconductor layer; wherein the first and thesecond semiconductor layers are stacked so that the first and the secondinsulator films are positioned between the first and the secondsemiconductor layers in a first direction, wherein the first and thesecond semiconductor components are bonded to each other by a firstconductive portion disposed in a recessed portion formed in the firstinsulator film and a second conductive portion disposed in a recessedportion formed in the second insulator film, wherein the firstconductive portion includes a first pad surrounded by the firstinsulator film in a plane perpendicular to the first direction, and afirst via connected to the first pad so that the first via is positionedbetween the first pad and the first semiconductor layer in the firstdirection, the first via is connected to a first conductor layerpositioned between the first via and the first semiconductor layer inthe first direction, and a distance between the first via and the firstconductor layer is smaller than a distance between the first via and thesecond conductive portion, wherein the second conductive portionincludes a second pad surrounded by the second insulator film in a planeperpendicular to the first direction, and a second via connected to thesecond pad so that the second via is positioned between the second padand the second semiconductor layer in the first direction, the secondvia is connected to a second conductor layer positioned between thesecond via and the second semiconductor layer in the first direction,and a distance between the second via and the second conductor layer issmaller than a distance between the second via and the first conductiveportion, wherein at least one of the following relations (A), (C), (G),(H), (I), and (J), and at least one of the following relations (α) and(f) are satisfied:La<Lb,  (A)La/Lb<Ta/Tb,  (C)Ta>Tb,  (G)La*Ta>Lb*Tb,  (H)La−Lb<Ta−Tb,  (I)La+Ta<Lb+Tb,  (J) (α) the first conductor layer is mainly made ofaluminum, and (β) the second conductor layer is mainly made of copper,where La is a dimension of the first via in the first direction, Lb is adimension of the second via in the first direction, Ta is a dimension ofthe first pad in the first direction, and Tb is a dimension of thesecond pad in the first direction.
 19. The semiconductor apparatusaccording to claim 18, wherein the following relation (F) is satisfied:La/Wa>Lb/Wb,  (F) where Wa is a dimension of the first via in a seconddirection perpendicular to the first direction, and Wb is a dimension ofthe second via in the second direction.
 20. A device comprising: thesemiconductor apparatus according to claim 1; and any one of thefollowing six apparatuses: an optical apparatus corresponding to thesemiconductor apparatus; a control apparatus configured to control thesemiconductor apparatus, a processing apparatus configured to process asignal output from the semiconductor apparatus, a display apparatusconfigured to display information acquired from the semiconductorapparatus; a storage apparatus configured to store information acquiredfrom the semiconductor apparatus; and a mechanical apparatus configuredto operate based on information acquired from the semiconductorapparatus.
 21. A semiconductor apparatus comprising: a firstsemiconductor component including a first semiconductor layer and afirst insulator film over the first semiconductor layer; and a secondsemiconductor component including a second semiconductor layer and asecond insulator film over the second semiconductor layer; wherein thefirst and the second semiconductor layers are stacked so that the firstand the second insulator films are positioned between the first and thesecond semiconductor layers in a first direction, wherein the first andthe second semiconductor components are bonded to each other by a firstconductive portion disposed in a recessed portion formed in the firstinsulator film and a second conductive portion disposed in a recessedportion formed in the second insulator film, wherein the firstconductive portion includes a first pad surrounded by the firstinsulator film in a plane perpendicular to the first direction, and afirst via connected to the first pad so that the first via is positionedbetween the first pad and the first semiconductor layer in the firstdirection, the first via being connected to a first conductor layer inproximity to the first via, the first conductor layer being positionedbetween the first via and the first semiconductor layer in the firstdirection, wherein the second conductive portion includes a second padsurrounded by the second insulator film in a plane perpendicular to thefirst direction, and a second via connected to the second pad so thatthe second via is positioned between the second pad and the secondsemiconductor layer in the first direction, the second via beingconnected to a second conductor layer in proximity to the second via,the second conductor layer being positioned between the second via andthe second semiconductor layer in the first direction, wherein at leastone of the following relations (A), (B), (C), (D), and (E), at least oneof the following relations (α) and (β), and (L) are satisfied:La<Lb,  (A)Wa>Wb,  (B)La/Lb<Ta/Tb,  (C)Pa/Pb<Wa/Wb,  (D)La/Wa<Lb/Wb,  (E) and (α) the first conductor layer is mainly made ofaluminum, (β) the second conductor layer is mainly made of copper, andFh>Fd  (L) where La is a dimension of the first via in the firstdirection, Lb is a dimension of the second via in the first direction,Ta is a dimension of the first pad in the first direction, Tb is adimension of the second pad in the first direction, Wa is a dimension ofthe first via in a second direction perpendicular to the firstdirection, Wb is a dimension of the second via in the second direction,Pa is a dimension of the first pad in the second direction, Pb is adimension of the second pad in the second direction, Fd is a thicknessof a portion surrounding the around the first via and overlapping withthe first pad of the first insulator film, and Fh is a thickness of aportion surrounding the around the second via and overlapping with thesecond pad of the second insulator film.